An efficient test system based on the ceramic probe card and the preamplifier presented in this paper achieves a good solution for the impact from the distribution parameters in micromachined gyroscope chip testing.
采用低分布参数陶瓷探针卡和卡上前置放大器的静电驱动测试方案,解决了微机械陀螺管芯测试中分布参数的影响问题,测得准确的频率特性,获得应用、评估中必需的谐振频率、品质因数(Q值)等参数。
A bad management of probe cards will lead to very urgent request of new probe cards or over investment of probe cards under the condition of that there are many products,many probe cards and big fluctuation of delivery requirements in the same factory.
探针卡是芯片测试中最重要、最昂贵的消耗品。
